基于射频磁控溅射法制备ZnO薄膜研究

基于射频磁控溅射法制备ZnO薄膜研究

艾春鹏,赵晓锋,白忆楠,冯清茂,温殿忠

Preparation research of ZnO thin films by RF magnetron sputtering

AI Chunpeng, ZHAO Xiaofeng, BAI Yinan, FENG Qingmao, WEN Dianzhong

功能材料 . 2016, (S2): 81 -84 . DOI: 10.3969/j.issn.1001-9731.2016.增刊(Ⅱ).015