硅氮薄膜的摩擦性能与其表面能的相关性
石志锋,黄 楠,王 琳,宁成云,王迎军
Study on the correlation between surface energy andtribological property of silicon-nitride films
SHI Zhifeng,HUANG Nan,WANG Lin,NING Chengyun,WANG Yingjun
功能材料
.
2016, (12): 12001
-12006
.
DOI: 10.3969/j.issn.1001-9731.2016.12.001
