SiN<i><sub>x</sub></i>薄膜在纳米压痕下的变形和断裂行为

SiN_x薄膜在纳米压痕下的变形和断裂行为

安涛,邓晓芳,王丽丽,宋立军

Deformation and fracture behavior of SiN_x coating under nanoindentation test

AN Tao, DENG Xiaofang, WANG Lili, SONG Lijun

功能材料 . 2016, (10): 10235 -10238 . DOI: 10.3969/j.issn.1001-9731.2016.10.044