磁控溅射CrAlCN涂层的结构与性能研究
郭盛, 熊计, 赵海波, 杜昊, 鲜广
Structure and properties of CrAlCN COATINGS deposited by medium frequency magnetron sputtering
GUO Sheng, XIONG Ji, ZHAO Haibo, DU Hao, XIAN Guang
功能材料
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2016, (7): 7081
-7084
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DOI: 10.3969/j.issn.1001-9731.2016.07.016
