化学机械平坦化材料对蓝宝石抛光速率与粗糙度的影响
贾少华, 刘玉岭, 王辰伟, 闫辰奇
Effect of chemical mechanical planarization material on sapphire polishing rate and roughness
JIA Shaohua, LIU Yuling, WANG Chenwei, YAN Chenqi
功能材料
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2016, (2): 2242
-2246
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DOI: 10.3969/j.issn.1001-9731.2016.02.047
