固体透氧膜(SOM)法由SiO2电解制备多晶硅
赖冠全, 邹星礼, 程红伟, 郑凯, 李尚书, 耿淑华, 鲁雄刚
Preparation of polysilicon from SiO2 by the solid oxide oxygen ion-conducting membrane (SOM) method
LAI Guanquan, ZOU Xingli, CHENG Hongwei, ZHENG Kai, LI Shangshu, GENG Shuhua, LU Xionggang
功能材料
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2016, (2): 2177
-2182
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DOI: 10.3969/j.issn.1001-9731.2016.02.035
