石墨衬底上多晶硅厚膜的生长及性质分析
杨博,陈诺夫,孔凡迪,牟潇野,陶泉丽,白一鸣,陈吉堃
Preparation and properties of polycrystalline silicon thick film on graphite substrate
YANG Bo, CHEN Nuofu, KONG Fandi, MU Xiaoye, TAO Quanli, BAI Yiming, CHEN Jikun
功能材料
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2016, (4): 70
-73
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DOI: 10.3969/j.issn.1001-9731.2016.04.014
