Ge15Ga10Te75薄膜的磁控溅射制备及性能的可控研究
齐磊,王国祥,李双,沈祥,徐培鹏,李军,吕业刚,戴世勋,聂秋华
The controllable performance of Ge15Ga10Te75 thin films deposited by magnetron sputtering
QI Lei,WANG Guoxiang,LI Shuang,SHEN Xiang,XU Peipeng,LI Jun, LV Yegang,DAI Shixun,NIE Qiuhua
功能材料
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2016, (4): 17
-22
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DOI: 10.3969/j.issn.1001-9731.2016.04.004
