基底负偏压对直流磁控溅射CrN薄膜择优取向及表面形貌的影响
谈淑咏;张旭海
Effects of substrate negative bias voltages on preferred orientation and surface morphology of CrN films deposited by DC reactive magnetron sputtering
TAN Shu-Yong ;
. 2010, (06): 17 -0 .