α-SiOx:H钝化Cz-Si表面的工艺优化与机制分析
黄海宾;张东华;汪已琳;龚洪勇;高江;Wolfgang R. Fahrner;周浪
Optimization and Operation Mechanism Analysis of Cz-Si Wafer Passivation by α-SiOx:H Film
Hai-bin ZHANG ;;;;;
. 2014, (09): 16 -0 .