腐蚀液配方对刻蚀高阻硅多孔阵列结构形貌影响的研究

蒋稳;邹宇;伍建春;展长勇;朱敬军;安竹;杨斌;黄宁康

Effects of solution composition on morphology of macropore arrays etched by electrochemical etching on high ρ n-Si

;;;Chang-Yong Zhan ;;;

. 2013, (15): 16 -0 .