腐蚀液配方对刻蚀高阻硅多孔阵列结构形貌影响的研究
蒋稳;邹宇;伍建春;展长勇;朱敬军;安竹;杨斌;黄宁康
腐蚀液配方对刻蚀高阻硅多孔阵列结构形貌影响的研究
Effects of solution composition on morphology of macropore arrays etched by electrochemical etching on high ρ n-Si
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