超薄α-Ta(N)/TaN双层扩散阻挡层的微观结构与热稳定性

刘春海;崔学军;金永中;杨瑞嵩;王素娟;叶松

Microstructure and Thermal Stability of an Ultrathin α-Ta(N)/TaN Bi-layer Diffusion Barrier

LIU Chun-Hai;CUI Xue-jun;JIN Yong-zhong;YANG Rui-song;WANG Su-juan;YE Song

. 2013, (02): 202 -205 .