基于SVR的脉冲激光沉积TiN/AlN多层薄膜的工艺优化

皇思洁;蔡从中;曾庆文

Process parameters optimization for TiN/AlN multilayer films fabricated by pulsed laser deposition via SVR

Si-Jie HUANG;Cong-Zhong CAIQing-Wen ZENG

. 2013, (14): 2074 -2078 .