基于SVR的脉冲激光沉积TiN/AlN多层薄膜的工艺优化
皇思洁;蔡从中;曾庆文
基于SVR的脉冲激光沉积TiN/AlN多层薄膜的工艺优化
Process parameters optimization for TiN/AlN multilayer films fabricated by pulsed laser deposition via SVR
{{custom_ref.label}} |
{{custom_citation.content}}
{{custom_citation.annotation}}
|
/
〈 | 〉 |