磁控溅射制备氢掺杂氧化锌薄膜的掺杂性能研究

陈义川;胡跃辉;陈俊;陈新华;马德福

Investigation of the doping properties of ZnO:H thin film prepared by RF magnetron sputtering

CHEN Yi-chuan;HU Yue-hui;CHEN Jun;CHEN Xin-hua;MA De-fu

. 2013, (10): 1497 -1501 .