磁控溅射制备氢掺杂氧化锌薄膜的掺杂性能研究
陈义川;胡跃辉;陈俊;陈新华;马德福
磁控溅射制备氢掺杂氧化锌薄膜的掺杂性能研究
Investigation of the doping properties of ZnO:H thin film prepared by RF magnetron sputtering
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