亚波长分辨光刻介质特性研究

王向贤;石洪菲;张斗国;明海

Study of Characteristics of Photolithography medium with Sub-wavelength Resolution

Xiang-Xian WANG;Hong-Fei Shi;Dou-Guo Zhang;Hai Ming

. 2012, (09): 1177 -1180 .