电子束蒸发沉积重掺硅薄膜及其在低辐射玻璃上的应用

刘学丽;黄延伟;李向明;席俊华;季振国

Heavily doped Si film prepared by electron beam evaporation and its application in Low-e glass

;Yanwei Huang ;;

. 2012, (S1): 12 -0 .