溶胶-凝胶法制备氧化铝绝缘薄膜及其电性能研究

单威;姚曼文;胡保付;杨鹏飞;姚熹

Preparation and electrical properties of insulating aluminum oxide thin films by sol-gel process

SHAN Wei;YAO Man-wen;HU Bao-fu;YANG Peng-fei;YAO Xi

. 2013, (04): 581 -584 .