溶胶-凝胶法制备氧化铝绝缘薄膜及其电性能研究
单威;姚曼文;胡保付;杨鹏飞;姚熹
溶胶-凝胶法制备氧化铝绝缘薄膜及其电性能研究
Preparation and electrical properties of insulating aluminum oxide thin films by sol-gel process
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