多晶硅真空电磁感应熔炼除磷机制的研究

罗大伟;孙金玲;张爽

Research on the Removal Mechanism of Phosphorus from Polysilicon by Vacuum Induction Melting

LUO Dawei;SUN Jinling;ZHANG Shuang

. 2011, (09): 1551 -1554 .