薄膜厚度和退火温度对纳米多晶硅薄膜特性影响

赵晓锋;温殿忠;王天琦

Effect of Thin Films Thickness and Annealing Temperature on Structure Properties of Nano Polysilicon Thin Films

ZHAO Xiao Feng ;

. 2010, (10): 12 -0 .