He＋辐照对非经碳氢薄膜硬度的影响

孙莉;范红玉;李梦轲;刘东平;杨德明;杨杞;牛金海

The influence of He ion irradiation on the surface hardness of amorphous hydrocarbon film

SUN Li;FAN Hong-yu;LI Meng-ke;LIU Dong-ping;YANG De-ming;YANG Qi;NIU Jin-hai

. 2013, (S1): 67 -70 .