有机薄膜晶体管钛/金电极的刻蚀工艺研究

严剑飞;吴志明;太惠玲;李娴;付嵩琦

Investigation of the etching process of titanium/aurum electrodes of the organic thin film transistor

WU Zhiming;;;

. 2010, (S2): 1 -0 .