沉积速率对ZnO薄膜生长过程和微结构影响的分子反应力场方法研究*

刘永利;刘欢;祁阳

Reactive Force Field Study of the Effect of Subtract Temperature on the ZnO Film Growth Process and Microstructure

LIU Yong-li;LIU Huan;QI Yang

. 2013, (10): 1418 -1421 .