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中文
Controlled preparation, characterization and optimizing technology of uniform films at wafer scale
CHENG Zhengwang, DONG Jiachen, LI Pei, SHENG Fan, ZHAO Baozhang, WANG Xinhang, MA Xinguo
Journal of Functional Materials . 2026, (
5
): 76 -87 . DOI: 10.3969/j.issn.1001-9731.2026.05.010
