氮气流量对中频非平衡磁控溅射TiAlN薄膜结构及性能的影响

吴劲峰;何乃如

Influence of Nitrogen Flows on Structure and Properties of TiAlN Film Prepared by Mid-frequency Unbalanced Magnetron Sputtering

;Nai-Ru HE

. 2013, (01): 32 -35 .