Ti薄膜在Si基底上的生长模拟

Ti薄膜在Si基底上的生长模拟

吴清英;陈小龙;孙灵光;罗顺忠;朱建国

The growth simulation of Ti thin film onto Si substrate

WU Qing-ying;CHEN Xiao-long;SUN Ling-guang;LUO Shun-zhong;ZHU Jian-guo

. 2013, (05): 727 -730 .