感应耦合等离子体增强磁控溅射法制备MoO3高透亲水光学薄膜
彭井泉, 郑学军, 冯春阳, 李方, 黄乐, 陈立, 左滨槐, 陈丽娟, 贺楚才
Preparation of MoO3 high-transmittance hydrophilic optical films by inductively coupled plasma-enhanced magnetron sputtering
PENG Jingquan, ZHENG Xuejun, FENG Chunyang, LI Fang, HUANG Le, CHEN Li, ZUO Binhuai, CHEN Lijuan, HE Chucai
功能材料
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2023, (11): 11118
-11125
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DOI: 10.3969/j.issn.1001-9731.2023.11.014
