Ti-Al共掺杂Si薄膜的光电性能增强机理研究
陈玉杰, 杨洪旺, 林宇蓓, 邝向军, 温才
Study on the photoelectric performance enhancement mechanism of Ti-Al co-doped Si films
CHEN Yujie, YANG Hongwang, LIN Yubei, KUANG Xiangjun, WEN Cai
功能材料
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2023, (10): 10021
-10029
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DOI: 10.3969/j.issn.1001-9731.2023.10.004
