柔性基底上原子层热电堆热流敏感薄膜制备研究
夏涛, 赵睿鹏, 陈曦, 李禛哲, 陶伯万
Fabrication of tilted-texture thin films for flexible atomic layer thermopile heat flux sensor
XIA Tao, ZHAO Ruipeng, CHEN Xi, LI Zhenzhe, TAO Bowan
功能材料
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2022, (9): 9018
-9024
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DOI: 10.3969/j.issn.1001-9731.2022.09.004
