衬底温度对磁控溅射ZrN薄膜结构和物理性能的影响
高洁, 姚威振, 杨少延, 魏洁, 李成明, 魏鸿源
Effect of substrate temperature on structural and physical properties of ZrN films by magnetron sputtering
GAO Jie, YAO Weizhen, YANG Shaoyan, WEI Jie, LI Chengming, WEI Hongyuan
功能材料
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2021, (9): 9148
-9153
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DOI: 10.3969/j.issn.1001-9731.2021.09.024
