硅氧碳纳米镶嵌复合薄膜的氧空位形成与散热基板封装
杨敏, 毛宇, 陈奋, 周瑞, 廖亮, 陈增, 刘乐雨, 姚荣迁
Oxygen-vacancy formation and packaging technology of β-SiC/SiOxCy/Cfree nanocomposite films as heat dissipation substrate
YANG Min, MAO Yu, CHEN Fen, ZHOU Rui, LIAO Liang, CHEN Zeng, LIU Leyu, YAO Rongqian
功能材料
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2017, (6): 6199
-6202
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DOI: 10.3969/j.issn.1001-9731.2017.06.036
