磁控溅射制备Al掺杂氮化铜薄膜研究

磁控溅射制备Al掺杂氮化铜薄膜研究

袁作彬, 左安友, 李兴鳌

Study on the Al doped Cu₃N films prepared by magnetron sputtering

YUAN Zuobin, ZUO Anyou, LI Xingao

功能材料 . 2017, (5): 5180 -5184 . DOI: 10.3969/j.issn.1001-9731.2017.05.033