化学气相沉积制备Co-Re合金涂层的热力学分析

敬瑀, 龚伟, 王恩泽

Thermodynamic analysis of chemical vapor deposition process for Co-Re alloy coating

JING Yu, GONG Wei, WANG Enze

功能材料 . 2019, (3): 3170 -3173 . DOI: 10.3969/j.issn.1001-9731.2019.03.029