磁控溅射铜薄膜微观结构对其电爆性能的影响
胡云钦,邱林俊,代 波,魏贤华,任 勇,葛妮娜,龙 震
Effects of microstructureof Cu thin films deposited by magnetron sputtering on electro-explosive performance
HU Yunqin,QIU Linjun,DAI Bo,WEI Xianhua,REN Yong,GE Nina,LONG Zhen
功能材料
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2016, (12): 12152
-12156
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DOI: 10.3969/j.issn.1001-9731.2016.12.025
