带电粒子注入硅的辐照损伤模拟研究
郑贤利,刘 敏,夏艳芳,程品晶,张泊丽
Study on simulation of radiation damage of the charged particles implanted silicon
ZHENG Xianli,LIU Min,XIA Yanfang,CHENG Pinjing,ZHANG Boli
功能材料
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2016, (S1): 164
-168
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DOI: 10.3969/j.issn.1001-9731.2016.增刊(Ⅰ).029
