氧化剂浓度对4H-SiC化学机械抛光效果的影响

高飞,李晖,徐永宽

Influence of oxidant concentration on 4H-SiC chemical mechanical polishing result

GAO Fei, LI Hui, XU Yongkuan

功能材料 . 2016, (10): 10189 -10192 . DOI: 10.3969/j.issn.1001-9731.2016.10.035