ZrN/TiSiN纳米多层膜的微观结构和力学性能研究
郑伟, 李伟, 孟佳, 刘平, 马凤仓, 刘新宽, 陈小红, 何代华
Study on microstructure and mechanical properties of ZrN/TiSiN nanomultilayered films
ZHENG Wei, LI Wei, MENG Jia, LIU Ping, MA Fengcang, LIU Xinkuan, CHEN Xiaohong, HE Daihua
功能材料
.
2016, (1): 1038
-1042
.
DOI: 10.3969/j.issn.1001-9731.2016.01.008
