石墨衬底上具有(220)/(400)择优取向多晶硅薄膜的制备及性质

辛雅焜;陈诺夫

Preparation and properties of polycrystalline silicon thin films with (220) and (400) preferred orientation on graphite substrate

Ya-Kun XIN;

. 2015, (04): 31 -0 .