电子束注入对多孔硅吸杂效果的影响

游小刚;谭毅;李佳艳;石爽;郭素霞

Effect of electron beam injection on gettering effect of the porous silicon

Xiao-Gang YOU;;Jia-Yang Li ;Su-Xia GUO

. 2014, (08): 8 -0 .