倾斜磁控溅射低温沉积ZnO：Al薄膜及其光电性能的研究

冯兰;刁训刚;王涛;刘海鹰

Optical and Electrical Properties of ZnO: Al Films prepared by Tilted magnetron sputtering at low temperature

Lan Feng; ;

. 2010, (S2): 46 -0 .