MOCVD制备SiC：Al薄膜的导电类型调控研究

陈小庆;孙利杰;邬小鹏;钟泽;傅竹西

Growth control on the conduction type of SiC:Al films with MOCVD method

Chen Xiao Qing ;;;

. 2010, (07): 14 -0 .