新型MPCVD装置在高功率密度下高速沉积金刚石膜

于盛旺;李晓静;张思凯

Deposition of polycrystalline diamond films by a new type MPCVD reactor at high power density

YU Shengwang;LI Xiaojing;ZHANG Sikai

. 2011, (09): 1722 -1726 .