离子束溅射沉积Fe/Si多层膜法合成beta-FeSi2薄膜的研究

张娟;沈鸿烈;鲁林峰;唐正霞;江丰;李斌斌;刘恋慈;沈洲

Research on beta-FeSi2 thin films from Fe/Si multilayers deposited by ion beam sputtering

; ;;;;;

. 2010, (05): 25 -0 .