溅射功率对磁控溅射ZnO:Al(ZAO)薄膜性能的影响
高立华;郑玉婴
溅射功率对磁控溅射ZnO:Al(ZAO)薄膜性能的影响
Effects of Sputtering Power on Al Doped ZnO Thin Films Deposited by RF Magnetron Sputtering
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