Nb-Si-N纳米复合薄膜表面吸附与迁移的第一性原理研究
任元;刘学杰;谭心;魏怀
Nb-Si-N纳米复合薄膜表面吸附与迁移的第一性原理研究
Surface adsorption and diffusion of Nb-Si-N nano-composite films: A first principles study
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