基底温度复合控制对化学气相沉积纳米金刚石薄膜的影响
张湘辉;汪灵
基底温度复合控制对化学气相沉积纳米金刚石薄膜的影响
Effects of Substrate Temperature Composite Control Methods on DC Arc Discharge Plasma CVD nanocrystallite Diamond Films
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