
高压对高功率脉冲磁控放电等离子体注入与沉积氧化钒薄膜的影响
李春伟;巩春志;吴忠振
高压对高功率脉冲磁控放电等离子体注入与沉积氧化钒薄膜的影响
Influence of High Voltage on Vanadium Oxide Films Fabricated by High Power Pulsed Magnetron Discharge Ion Implantation & Deposition
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